Introduction

Higher resolution cameras paired with increased processing speeds have significantly improved accuracy, which is essential for manufacturers of semiconductor wafer inspection and metrology equipment.

While companies like Samsung and Apple address consumer demands for better smartphones and tablets, the semiconductor manufacturing industry supports these advancements by focusing on innovation. To boost smartphone capabilities, more powerful processors with denser chips are necessary, presenting new challenges for inspection and metrology equipment manufacturers.

Detecting Smaller Features

The shift toward 20 and 22 nm technology nodes brings significant changes to semiconductor manufacturing. There’s an ongoing transition from off-line destructive analysis to in-line inspection. This evolution requires various types of inspection and metrology equipment with high-quality visible, infrared (IR), or ultraviolet (UV) cameras.

Bare Wafer Metrology

Before transistors are fabricated, incoming silicon wafers must be analyzed for flatness and defects. These inspections help classify wafers so the best ones can be used for advanced technology nodes. Interferometry is typically employed for these measurements. Highly stable cameras with low noise are essential for accurate results.

Overlay Metrology

As features become smaller, precise layer alignment becomes increasingly important. All overlay metrology techniques require high-quality cameras. The camera quality must exceed production line variations to ensure measurements aren’t affected by image noise.

Advanced Inspection Techniques

Micro-defect inspection requires higher resolution cameras due to the decreasing size of devices and components. Even particles that disrupt manufacturing are smaller with advanced technology nodes. Similarly, critical dimension (CD) metrology demands tighter dimensional accuracy, which is enabled by improved camera capabilities.

Increasing Throughput

All these techniques require maintaining or improving throughput while enhancing precision. Camera manufacturers face the challenge of preserving image quality at high frame speeds, but this is achievable through technologies like burst mode and CoaXPress.

Improving Yield

Better metrology enables problem detection and prevention, leading to improved yields. Even a 0.1% yield increase translates to substantial profitability gains. Consistent camera performance reduces measurement variability, enabling more accurate process analysis and corrective actions.

Conclusion

High-resolution cameras with fast frame rates provide the necessary images for inspecting and measuring advanced semiconductor devices that power today’s smartphones and tablets. These technological advancements enable manufacturers to meet increasing demands while maintaining quality and efficiency in production processes.

Last Updated: 2025-09-04 19:03:24